| 摘要 |
A method for graphically representing the progress of wafers being processed in a plurality of process stations is disclosed. In one step, the start of a process performed on the wafers in one of the plurality of process stations is determined. Then, the generation of a first line segment parallel to a first axis is initiated. Next, the end of the process in one of the plurality of process stations is determined. Then the generation of the first line segment parallel to the first axis is terminated. The start of a transfer of the wafers from one of the plurality of process stations to another one of the plurality of process stations is detected in a next step. Then, the formation of a second line segment connected with the first line segment and substantially perpendicular to the first axis is initiated. The completion of the transfer of the wafers is then determined and the formation of the second line segment perpendicular to the first axis is terminated. The process is then repeated for each process station until the wafers have been processed through all the process stations.
|
