发明名称 Double-sided capacitor structure for a semiconductor device and a method for forming the structure
摘要 A method used to manufacture a semiconductor device comprises providing a first conductive container capacitor top plate layer and etching the first conductive container capacitor top plate layer to form a plurality of openings therein. Subsequently, a container capacitor bottom plate layer is formed within the plurality of openings in the top plate layer such that the bottom plate layer defines a plurality of openings. A second conductive container capacitor top plate layer is formed within the plurality of openings in the bottom plate layer. The first conductive container capacitor top plate layer is electrically coupled with the second conductive container capacitor top plate layer. The first and second conductive container capacitor top plate layers and the container capacitor bottom plate layer form a plurality of container capacitors. A structure resulting from the method is also disclosed.
申请公布号 US6974993(B2) 申请公布日期 2005.12.13
申请号 US20040941735 申请日期 2004.09.13
申请人 MICRON TECHNOLOGY, INC. 发明人 COURSEY BELFORD T.
分类号 H01L21/02;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L21/02
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