发明名称 Two part retaining ring
摘要 A retaining ring is made of two generally annual portions. One portion has depressions and the other portion has projections that extend into the depressions when the two portions are brought together. The projections can have a cross section with two outwardly sloped sides.
申请公布号 US6974371(B2) 申请公布日期 2005.12.13
申请号 US20030427750 申请日期 2003.04.30
申请人 APPLIED MATERIALS, INC. 发明人 CHEN HUNG CHIH;OH JEONGHOON;ZUNIGA STEVEN M.;TOLLES ROBERT D.
分类号 B24B37/04;B24B41/06;(IPC1-7):B24B47/02 主分类号 B24B37/04
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