| 摘要 |
An illumination device according to the present invention comprises a light source ( 1 ), an optical fiber bundle ( 4 ), a coupling-in optical system ( 3 ) before and a coupling-out optical system ( 5 ) after the fiber bundle ( 4 ), and an illuminating optical system ( 17; 20 ). A homogenizing optical system ( 6 ) between the coupling-out optical system ( 5 ) and illuminating optical system ( 17; 20 ) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system ( 6 ) advantageously comprises a micro-honeycomb condenser ( 7 ) and a lens member ( 8 ) which superimpose the exit opening of the fiber bundle ( 4 ) in an intermediate image plane ( 10 ) to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage ( 26 ) for receiving a substrate with a feature ( 31 ) that is to be measured, an illumination system with a light source ( 1 ), an optical fiber bundle ( 4 ), a coupling-in optical system ( 3 ), a coupling-out optical system ( 5 ), an illuminating optical system ( 17; 20 ) for illuminating an image field on the substrate, and a detector device ( 14 ) for determining the position of the feature. A homogenizing optical system ( 6 ) between the coupling-out optical system ( 5 ) and illuminating optical system ( 17; 20 ) brings about a homogenization of the intensity distribution in the image field.
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