发明名称 |
Damascene optical waveguides |
摘要 |
A method for fabricating electromagnetic waveguides. The primary expected application is for the formation of dielectric type waveguides suitable for the confinement and guidance of intra-red and visible wavelengths. A secondary application is the formation of waveguides which can be filled with liquids or gases. The method uses standard microelectronic processing techniques.
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申请公布号 |
US6975802(B1) |
申请公布日期 |
2005.12.13 |
申请号 |
US20050136802 |
申请日期 |
2005.05.26 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE |
发明人 |
MAKI PAUL A.;PALMATEER SUSAN C. |
分类号 |
G02B6/10;G02B6/13;(IPC1-7):G02B6/10 |
主分类号 |
G02B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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