| 摘要 |
A resonance scanner, wherein a frame ( 3 ), a drive plate ( 4 ), a mirror ( 5 ) and torsion springs ( 6, 7 ) form an actuator part ( 1 ), said drive plate ( 4 ) being attached within the frame ( 3 ) by two first torsion springs ( 6 ) such that the drive plate ( 4 ) can oscillate about a common first axis of torsion ( 8 ) of both torsion springs ( 6 ), said mirror ( 5 ) being attached within the drive plate ( 4 ) by two second torsion springs ( 7 ) such that the mirror ( 5 ) can oscillate about a common second axis of torsion ( 9 ) of both torsion springs ( 7 ), and said first axis of torsion ( 8 ) and said second axis of torsion ( 9 ) being parallel to each other; wherein, further, only the frame ( 3 ) of the actuator part ( 1 ) is attached to side walls ( 10 ) of a box-shaped stator part ( 2 ), a drive means (stator electrodes 15 or coil 24 ) is arranged at a bottom ( 11 ) of the stator part ( 2 ) only in the region of the geometrical surface area of the drive plate ( 4 ) and said bottom ( 11 ) has a recess ( 13 ) in the region of the geometrical surface area of the mirror ( 5 ), which recess ( 13 ) is dimensioned at least such that a maximum mechanical deflection of the mirror ( 5 ) is not limited by the bottom ( 11 ), said drive means (stator electrodes 15 or coil 24 ) applying a force only directly to the drive plate ( 4 ) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror ( 5 ), which differs from the eigenfrequency of the drive plate ( 4 ).
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