PROCESSING APPARATUS,申请号KR20007009890-传众专利搜索

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发明名称	PROCESSING APPARATUS
摘要
申请公布号	KR100536313(B1)	申请公布日期	2005.12.12
申请号	KR20007009890	申请日期	2000.09.06
申请人		发明人
分类号	H01L21/3063;(IPC1-7):H01L21/306	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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