摘要 |
<p>A photodiode array (1) is provided with an n-type silicon substrate (3). A plurality of photodiodes (4) are formed in an array form on the surface opposite to the surface, onto which a light (L) to be detected enters, of the n-type silicon substrate (3). Spacers(6), each having a specified height, are provided in an area that does not correspond to a photodiode (4)-formed area on the light-to- be-detected (L)-incident surface of the n-type silicon substrate (3).</p> |