Method of producing substrate having patterned organosilane layer and method of using the substrate having the patterned organosilane layer

摘要

Provided are a method of producing a substrate having a patterned organosilane layer and a method of using the substrate having the patterned organosilane layer. The method of producing the substrate having the patterned organosilane layer, includes: coating organosilane on a substrate to obtain an organosilane layer; coating a photoresist material on the organosilane layer; exposing the photoresist material to light through a mask to obtain a patterned surface on the photoresist material; developing an exposed or unexposed region of the photoresist material using a developer; and wet etching a portion of the organosilane layer in the region from which the photoresist material has been removed, using a HF-containing solution as an etchant.