Method for processing optical element of interferometer optics, involves determining deviation of optical surface of optical element from target shape based on interferometric measurement and property of interferometer optics

摘要

The method involves measuring property of interferometer optics (43) and arranging optical surface (19) of optical element of optics at measuring position relative to optics within beam of measuring light (44) for performing interferometric measurement. The deviation of optical surface from target shape is determined based on interferometric measurement and measured property of interferometer optics. An independent claim is also included for optical apparatus.