摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic material which is coated with a ceramic film having excellent adhesiveness, insulation property, anti-corrosion property, abrasion resistance, and preciseness/uniformity to increase a space factor, and which excels in iron loss and magneto-striction properties. SOLUTION: The magnetic material has such a structure that the ceramic film formed of SiN<SB>X</SB>and/or SiO<SB>2</SB>wherein metal Si in the film has a gradient concentration in the thickness direction is formed on the surface of a substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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