| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus which can enhance blue color sensitivity by reducing the absorption of light in a wavelength region equal to or less than the wavelength blue color visible light by a protection film. SOLUTION: In a pixel and wiring, protection films 10a, 10b formed of silicon nitride or oxide silicon nitride are formed. Since the protection film 10b in the pixel is formed thinner than the protection film 10a in the wiring, the absorption of light can be lowered, for example, in the wavelength region of the blue color visible light from a near ultraviolet ray by the protection film 10b. Namely, the transmissivity of light can be improved in the wavelength region. Accordingly, an amount of light guided to a light receiving portion to receive the light in the wavelength region can be increased and signal charge generated by photoelectric conversion is increased with an increase in an amount of light inputted to the light receiving portion. COPYRIGHT: (C)2006,JPO&NCIPI
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