| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of parallelly inspecting both sides of a substrate by enhancing temporal efficiency, and a substrate inspection method using it. SOLUTION: First and second inspection stages 2 and 3 are constituted rotatably and four surface-A and surface-B inspection and adsorption tables 22 and 32 are provided. The surface-A and surface-B inspection and adsorption tables 22 and 32 are changed in the distance from a rotary shaft by the extending and contracting action of air cylinders 23 and 33. The substrate S is adsorbed and fixed on the surface-A inspection and adsorption tables 22 from a substrate supply part 7 and, after the surface A of the substrate S is imaged by a surface-A inspection head 4, the substrate S is delivered to a second inspection stage 3. Next, the substrate S is adsorbed and fixed on the surface-B table 32 and, after the surface B of the substrate S is imaged by a surface B-inspection head 5, the substrate S is discharged to a substrate housing part 8. The substrate inspection device 1 is constituted so as to parallelly perform these processings. COPYRIGHT: (C)2006,JPO&NCIPI
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