| 摘要 |
PROBLEM TO BE SOLVED: To deposit a homogeneous thin film on a base body of an uneven shape or the like with an arbitrary film thickness distribution. SOLUTION: A cathode unit 5 is turned around the axis Ot. A base body rotating shaft 18 to control the target angle Tθand rotate a base body W is pivotally driven around a shaft 17a to radially scan the base body W and control the scanning axis angle Sθ, and at the same time, controls the distance Ts between target base bodies to be constant by moving the base body rotating shaft 18 in the axial direction by a TS driving system 22. Cylindrical chimneys 16a-16d are provided on front faces of targets 14a-14d. Uniform film quality and highly accurate film thickness distribution are realized by setting the ratio of the chimney height H to the distance TS between target base bodies to be≥40%. COPYRIGHT: (C)2006,JPO&NCIPI
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