发明名称 Laser structuring for manufacture of thin film silicon solar cells
摘要 A method of manufacturing thin-film, series connected silicon solar cells having a ZnO TCO layer, for example, using an ultraviolet scribing laser to scribe said ZnO TCO layer to form relatively smooth walls through said TCO layer.
申请公布号 US2005272175(A1) 申请公布日期 2005.12.08
申请号 US20050141620 申请日期 2005.05.31
申请人 MEIER JOHANNES;GRUNDMULLER RICHARD 发明人 MEIER JOHANNES;GRUNDMULLER RICHARD
分类号 B23K26/40;H01L21/00;H01L27/142;H01L31/0224;H01L31/18;(IPC1-7):H01L21/00 主分类号 B23K26/40
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