发明名称 TAPE ADHERING APPARATUS AND TAPE ADHERING METHOD
摘要 <p>A tape adhering apparatus and a tape adhering method are provided for excellently adhering a tape member to a work, simplifying a process, reducing cost and improving adhering strength. A tape adhering apparatus (10) is provided to adhere a tape member (12) to a work (11). The tape adhering apparatus is provided with a stretch sheet member (25) whereupon the work (11) is to be placed, a vacuum chamber (50) positioned on an upper surface side of the stretch sheet member (25), an air introducing part (51) positioned on a lower surface side of the stretch sheet member (25), a placing part (22b) whereupon the stretch sheet member (25) is placed, a holding member (26) for holding the stretch sheet member (25) under a condition where air conduction into the vacuum chamber (50) is prevented, a tape holding means (66) for holding a tape member (12) at an upper part of the work (11), a first sucking means (36) for vacuum-sucking the inside of the vacuum chamber (50), a second sucking means (36) for vacuum-sucking the air introducing part (51), an air introducing means (41) for introducing air into the air introducing part (51), and a pressurizing means (36) for introducing air into the vacuum chamber (50) under pressurized condition.</p>
申请公布号 WO2005117099(A1) 申请公布日期 2005.12.08
申请号 WO2005JP07056 申请日期 2005.04.12
申请人 TSUBAKI SEIKO INC.;SAITO, KIMIKAZU;SUZUKI, TETSUSHI 发明人 SAITO, KIMIKAZU;SUZUKI, TETSUSHI
分类号 C09J5/00;H01L21/00;H01L21/304;H01L21/306;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 C09J5/00
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