APPARATUS, METHOD, AND PROGRAM FOR SHAPE SIMULATION

摘要

PROBLEM TO BE SOLVED: To provide a shape simulation technology for micromachining whereby a simulation result with high precision can be obtained.

SOLUTION: A surface relation matrix arithmetic processor 222 evaluates the visibility of elements depending on positional relations of surface elements to reflect a shadow effect and a readhesion effect on the simulation result, and further a beam condition calculation processor 221 calculates a beam condition in response to the position of the elements on a wafer to reflect a difference from a processed shape due to a difference from the positions on the wafer onto the simulation result.

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