| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask structural body and its manufacturing method wherein a high precision of the mask structural body obtained by a photo-lithographic method can be maintained just as it is and a high precision display panel can be manufactured by using it. SOLUTION: This is the manufacturing method of the mask structural body arranged on a plate board when an organic material layer is vapor-deposited at a desired position on the plate board. It has a process to form a resist 2 of a prescribed shape on an electroforming base material 1 by the photo-lithographic method, a process to form a metal film to become the mask 3 on the electroforming base material electroforming base material electroforming base material 1 on which the resist 2 is formed, a process to remove the resist 2 and to form a plurality of minute pores in the mask 3, and a process to treat by masking 5 on the parts except a part of the electroforming base material 1 corresponding to the region of the minute pores of the mask 3, then to establish a penetration hole 6 by etching to form a frame body 1. COPYRIGHT: (C)2006,JPO&NCIPI
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