| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generation control method and a device for the same capable of accurately controlling an amount of electron beam and X rays. SOLUTION: Under the condition of imaging on a target at all times, when an amount of electron beam to be controlled reaching the target, namely, a target current (brightness) is input (step S2), an excitation strength of a first convergence coil, and that of a second convergence coil can be decided by an operation (step S3, S4), and the target current is controlled by manipulating respective convergence coils depending on the excitation strength thereof (step S5). Since the amount of X rays is proportional to the target current, the amount of X rays is also controlled by manipulating the convergence coils depending on the excitation strength as a manipulation amount. As a result, comparing with a method of controlling the amount of electron beam (emission current) in the neighborhood of a Wehnelt electrode by manipulating the Wehnelt electrode, and controlling the amount of X rays as well, the amount of electron beam and X rays can be accurately controlled. COPYRIGHT: (C)2006,JPO&NCIPI
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