Thin silicon plates washing method, involves clamping plates on two front sides lying opposite to each other during washing of plates, and feeding washing fluid between plates into upper area of plates

摘要

The method involves clamping silicon plates (2) on two front sides lying opposite to each other when washing the plates, and feeding a washing fluid between the plates into an upper area of the plates. The washing fluid is fed into a lower area of the plates after feeding the fluid into the upper area of the plates. The plates are washed in a closed chamber, where clamping of the plates takes place by a fluid operating membrane. An independent claim is also included for a device for washing a thin silicon plate.