| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for automatically adjusting the focus in a laser beam machine by detecting the reflected beam of the laser beam. <P>SOLUTION: The laser beam output from the laser generator 550 of the laser beam machine is reflected to a mirror 570 via an output mirror 560, and is introduced to the laser beam machining tool 60. The laser beam converged by a machining lens 62 is reflected by a reflecting plate M<SB>1</SB>, and is detected by a reflected beam detecting device 580. The automatic adjustment of the focus can be achieved by detecting the output of the reflected beam and the variation in the focal position due to the dirt of the machining lens 62. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
