SUBSTRATE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of clearly imaging the pattern on a substrate. SOLUTION: An imaging head 10 is equipped with a CCD line sensor 20, six first illumination means 30 and a pair of second illumination means 40. The second illumination means 40 are arranged on both sides of the LED arranging direction in the first illumination means 30 so that the irradiation angle of the lights emitted from the second illumination means 40 to the surface of the substrate when the lights emitted from the second illumination means 40 are projected on a reference plane abcd is different from the irradiation angle to the surface of the substrate of the lights emitted from the first illumination means 30 when the lights emitted from the first illumination means 30 are projected on the reference plane abcd. COPYRIGHT: (C)2006,JPO&NCIPI