| 摘要 |
PROBLEM TO BE SOLVED: To provide (1) a method and device for manufacturing a substrate for a biochip capable of preventing a metal film from being separated in an assay solution, without using a substrate film such as chromium, (2) a surface plasmon measuring substrate having a metal film uniform with precision in an order of 1nm, and capable of preventing the metal film from being separated in the assay solution, and (3) a gold single crystal substrate for a scanning type probe microscope precluded from being separated in the assay solution. SOLUTION: In this manufacturing method for the gold substrate for the biochip, gold is vapor-deposited on a plasma-treated face of a substrate under a vacuum condition to form a gold thin film, after plasma-treating a surface of the substrate under the vacuum condition. COPYRIGHT: (C)2006,JPO&NCIPI
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