发明名称 |
Semiconductor laser device |
摘要 |
A manufacturing method for a semiconductor laser in which a ratio of a layer thickness obtained by adding the layer thickness of a p-type GaAs cap layer and the layer thickness of a p-type Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As (X=0.550) second cladding layer to a layer thickness obtained by adding the layer thickness of a p-type GaAs cap layer and the layer thickness of a p-type AlGaInP second upper cladding layer is identical to a ratio of an etching rate for dry etching of the p-type GaAs cap layer and the p-type Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As (X=0.550) second cladding layer to an etching rate for dry etching of the p-type GaAs cap layer and the p-type AlGaInP second upper cladding layer.
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申请公布号 |
US2005271108(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050138382 |
申请日期 |
2005.05.27 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
WADA KAZUHIKO;MIYAZAKI KEISUKE;MORIMOTO TAIJI;TATSUMI MASAKI;UEDA YOSHIAKI |
分类号 |
H01S5/22;G11B7/125;H01S5/00;H01S5/223;H01S5/343;H01S5/40;(IPC1-7):H01S5/00 |
主分类号 |
H01S5/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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