发明名称 Semiconductor laser device
摘要 A manufacturing method for a semiconductor laser in which a ratio of a layer thickness obtained by adding the layer thickness of a p-type GaAs cap layer and the layer thickness of a p-type Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As (X=0.550) second cladding layer to a layer thickness obtained by adding the layer thickness of a p-type GaAs cap layer and the layer thickness of a p-type AlGaInP second upper cladding layer is identical to a ratio of an etching rate for dry etching of the p-type GaAs cap layer and the p-type Al<SUB>x</SUB>Ga<SUB>1-x</SUB>As (X=0.550) second cladding layer to an etching rate for dry etching of the p-type GaAs cap layer and the p-type AlGaInP second upper cladding layer.
申请公布号 US2005271108(A1) 申请公布日期 2005.12.08
申请号 US20050138382 申请日期 2005.05.27
申请人 SHARP KABUSHIKI KAISHA 发明人 WADA KAZUHIKO;MIYAZAKI KEISUKE;MORIMOTO TAIJI;TATSUMI MASAKI;UEDA YOSHIAKI
分类号 H01S5/22;G11B7/125;H01S5/00;H01S5/223;H01S5/343;H01S5/40;(IPC1-7):H01S5/00 主分类号 H01S5/22
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