PHOTODIODE ARRAY, METHOD FOR MANUFACTURING SAME, AND RADIATION DETECTOR

摘要

A photodiode array, a method for manufacturing the same, and a radiation detector are disclosed wherein noises attributed to damage in a photo-sensing portion which is given during mounting are prevented. A photodiode array (1) comprises an array of a plurality of photodiodes (4) formed on a surface of an n-type silicon substrate (3) upon which a light to be sensed is incident and through wirings (8) which respectively correspond to the photodiodes (4) and penetrate the substrate from the incidence surface to the back surface. The incidence surface of the photodiode array (1) is provided with recessed portions (6) which are dented with a certain depth when compared with other surface portions where no photodiode (4) is formed. The photodiodes (4) are respectively formed in these recessed portions (6).