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发明名称
Wafer-Transfervorrichtung mit elektrischer Leitfähigkeit und Verfahren zu dessen Herstellung
摘要
申请公布号
DE60207105(D1)
申请公布日期
2005.12.08
申请号
DE20026007105
申请日期
2002.12.02
申请人
E.I. DU PONT DE NEMOURS AND CO., WILMINGTON;NIPPON OIL CORP., TOKIO/TOKYO;ISHIHARA CHEMICAL COMPANY LTD., TOKIO/TOKYO
发明人
SAKAI, SHUJI;MILLER, L.;UCHIDA, DAISUKE;KOBAYASHI, TAKASHI;AOYAGI, KENICHI;YAMAMOTO, SHINJI
分类号
H01L21/677;H01L21/687;(IPC1-7):H01L21/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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