| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electronic source using carbon nano-fibers, and its manufacturing method, wherein smoothing of an electric field at the tip part of the carbon nano-fibers can be prevented, and electron emission can be carried out effectively. <P>SOLUTION: After graphite film is formed on a substrate 3 by operating an arc plasma gun 5 in a reactor 2 in which pressure is adjusted, by irradiating an ion beam for a prescribed period of time on a surface of the substrate 3 by operating the arc plasma gun 6, a numerous number of nearly conical projections are formed on the surface of the substrate 3 at a prescribed spacing, and the carbon nano-fibers are formed on the top part of the respective projections. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
