发明名称 THINNER COMPOSITION FOR REMOVING PHOTORESIST AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE OR LIQUID CRYSTAL DISPLAY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a thinner composition for removing a photoresist, the composition which is used for a glass substrate to be used for a liquid crystal display and for the peripheral edge and the back face of a wafer to be used for the manufacture of a semiconductor so that a photoresist as unnecessary depositing can be efficiently removed in a short period of time. SOLUTION: The thinner composition for removing a photoresist contains (a) alkyl amide and (b) alkyl ethanoate. Preferably, the thinner composition contains (a) 1 to 99 parts by weight of alkyl amide and (b) 1 to 80 parts by weight of alkyl ethanoate. In the method for manufacturing a semiconductor device or a liquid crystal display, the above thinner composition is used. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005338825(A) 申请公布日期 2005.12.08
申请号 JP20050146572 申请日期 2005.05.19
申请人 DONGJIN SEMICHEM CO LTD 发明人 YOON SUK-IL;PARK HEE-JIN;JON JONHYUN;KIM BYUNG-UK
分类号 G03F7/42;G03F7/26;G03F7/32;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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