| 摘要 |
PROBLEM TO BE SOLVED: To perform planar scanning by imposing less load to an optical system for beam shaping, highly precisely coping with multi-beam system, easily widening the beam width and allowing a unit including the optical system such as a lens to be miniaturized when writing with a multibeam. SOLUTION: An optical scanning mirror 100 has four mirrors. Each mirror has two mirror faces 104 and 105, and the mirror face is separated by two blanking parts 106. On the mirror face, an inclination to a rotation center axis 102 toward a terminal 104b from a start end 104a is continuously changed to constitute a face twisted by regarding a circumference 103 as a reference. A beam emission cycle is controlled so that a dot interval formed on a scanning face is a substantially regular interval to a mirror rotation angle. COPYRIGHT: (C)2006,JPO&NCIPI
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