ALIGNMENT DEVICE, EXPOSURE APPARATUS, ALIGNMENT METHOD AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD AND (TOOL) RETICLE FOR CALIBRATION

摘要

PROBLEM TO BE SOLVED: To make an accurate alignment of an object.

SOLUTION: A tool reticle is loaded onto a pre-alignment stage 110, and positional information of a mark on the tool reticle is detected by a pre-alignment system 45. Then, the tool reticle is loaded onto a reticle stage RST via an exchange arm 120, and positional information of the reticle is detected by a reticle alignment system 22. From these detection results, a deviation is calculated between the pre-alignment detection system and the RA coordinate system. When actually making a pre-alignment of the reticle on the reticle pre-alignment stage 110, the calculated deviation is taken into consideration.

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