| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact pulse stretcher capable of significantly lengthening a pulse from a lithographic lighting source and to provide a lithographic system including such a stretcher. <P>SOLUTION: The pulse stretcher and the lithographic system including the stretcher wherein the pulse stretcher includes a single pass pulse stretcher, a first prism and a second prism disposed on either surface of the single pass pulse stretcher, and a beam is incident on the single pass pulse stretcher and reflected in a helical path using the first and the second prisms for a multiple pass passing through the single pass pulse stretchers are provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
