发明名称 FORMATION METHOD OF PCMO THIN FILM HAVING MEMORY RESISTANCE PROPERTY AND PCMO DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a PCMO device having a reversible resistance switch property according to a unipolar or bipolar voltage pulse, and a formation method of a PCMO thin film. <P>SOLUTION: In a formation method of a PCMO (Pr<SB>0.3</SB>Ca<SB>0.7</SB>MnO<SB>3</SB>) thin film having a crystal state associated with a memory resistance property, a step of forming a PCMO thin film having a first crystal state, and a step of changing a resistance condition of the PCMO thin film by using pulse polarity according to the first crystal state. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005340786(A) 申请公布日期 2005.12.08
申请号 JP20050123111 申请日期 2005.04.21
申请人 SHARP CORP 发明人 ZHUANG WEI-WEI;LI TINGKAI;HSU SHENG TENG;ZHANG FENGYAN
分类号 H01L27/105;H01L21/00;H01L21/20;H01L27/10;H01L45/00;H01L49/02 主分类号 H01L27/105
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