| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form a mechanism exactly adjusting pressure to specific secondary pressure even in a low pressure region with precision in a compact and simple structure when adjusting the pressure in order to obtain the specific secondary pressure in spite of fluctuations on the primary pressure of a fluid. <P>SOLUTION: A pressure regulator comprises an inlet 13 introducing a primary pressure fluid; a primary adjusting valve 3 to reduce the pressure to the secondary pressure; a pressure regulating chamber 11 to which the fluid flows in via the primary adjusting valve 3; a diaphragm 2 displaced by receiving the secondary pressure; a shaft 6 interlocking the diaphragm 2 and the primary adjusting valve 3; a pressure setting portion 5 adjusting a displaced amount of the diaphragm 2; and an outlet 14 discharging the secondary pressure fluid. The shaft 6 comprises a secondary adjusting valve 4 which is operated by interlocking with the first adjusting valve 3, adjusts the pressure of the fluid, which flows into the pressure regulating chamber 11 via the primary adjusting valve 3, with an opening/closing operation which is opposite to that of the primary adjusting valve 3, and has a pressure adjusting characteristic relative to primary pressure change, which is inverse with that of the primary adjusting valve 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
