| 摘要 |
PROBLEM TO BE SOLVED: To ensure stabilized pulse energy by restraining the lowering of the pulse energy at high repetition frequency (e.g., 4,000 Hz) in an ArF excimer laser apparatus. SOLUTION: Ozone O<SB>3</SB>, HO<SB>2</SB>, H<SB>2</SB>O<SB>2</SB>produced in a discharge space 120 and in the vicinity of the same go along a circulation flow passage 200 and again returns to the discharge space 120. Either of ozone O<SB>3</SB>, HO<SB>2</SB>, H<SB>2</SB>O<SB>2</SB>produced during that time is thermally decomposed. Further, ultraviolet light is irradiated to either of ozone O<SB>3</SB>, HO<SB>2</SB>, H<SB>2</SB>O<SB>2</SB>produced in the discharge space 120 and in the vicinity of the same, during the time ozone O<SB>3</SB>, HO<SB>2</SB>, H<SB>2</SB>O<SB>2</SB>go along the circulation flow passage 200 and again return to the discharge space 120. Consequently, either of ozone O<SB>3</SB>, HO<SB>2</SB>, H<SB>2</SB>O<SB>2</SB>is decomposed. COPYRIGHT: (C)2006,JPO&NCIPI |
