| 摘要 |
PROBLEM TO BE SOLVED: To reduce a contamination possibility in a clean space at a so-called door opening in an FIMS system. SOLUTION: As a drive mechanism for driving the door of a load port in the FIMS system, the one at a different drive velocity at an initial drive stage and in a state other than that is employed. In particular, at the initial drive stage, the door can be driven at a very low velocity, and after the door is opened by a predetermined amount, the door is driven at a high velocity controlled ordinarily. COPYRIGHT: (C)2006,JPO&NCIPI
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