| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of manufacturing steps of longitudinal wiring for connecting a pixel electrode film to a signal reader and to improve photoelectric conversion performance in a photoelectric conversion film laminate solid stage imaging device. SOLUTION: The photoelectric conversion film laminate solid stage imaging device includes a plurality of photoelectric conversion films 121r, 121g, 121b interposed between a pixel electrode film patterned for each pixel, and opposed electrode films 122r, 122g, 122b opposed to the pixel electrode film are laminated on a semiconductor substrate 130 formed with signal readers 102r, 102g, 102b through insulation layers 127, 128. The pixel electrode film of the upper layer photoelectric conversion film is connected to the signal reader by longitudinal wiring 114r, 114g, 114b passing through a lower layer photoelectric conversion film. A penetrating part which penetrates the lower layer photoelectric conversion film 121r of the longitudinal wiring is formed by embedding an opening opened with a conductive material from the same surfaces 116b, 116g of the pixel electrode film laminated on the photoelectric conversion film 121r to the upper end face (118b, 117g) of the insulating layer 127 laminated on the photoelectric conversion film 121r. COPYRIGHT: (C)2006,JPO&NCIPI
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