发明名称 |
Optical element, optical apparatus, film forming method, film forming apparatus and device fabrication method |
摘要 |
An optical element includes a multilayer film, and a substrate, wherein the multilayer film includes a first thin film that is formed on the substrate, and made of fluorine-doped oxide or nitride, and a second thin film that is formed on the first thin film, and made of a fluoride material.
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申请公布号 |
US2005270636(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050144168 |
申请日期 |
2005.06.03 |
申请人 |
YASAKI YOICHI;BANNO KEISUI |
发明人 |
YASAKI YOICHI;BANNO KEISUI |
分类号 |
G02B1/11;C03C17/34;C23C14/06;G02B1/12;G02B5/08;H01L21/027;(IPC1-7):G02B5/08 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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