发明名称 Method of producing a piezoelectric/electrostrictive device and piezoelectric/electrostrictive element
摘要 A piezoelectric/electrostrictive device is provided, including a pair of mutually confronting thin plate portions, a fixing portion for supporting the pair of thin plate portions, movable portions provided at tip end portions of the pair of thin plate portions and having mutually confronting end surfaces, and piezoelectric/electrostrictive elements disposed on respective thin plate portions. At least both side surfaces of the thin plate portions and the piezoelectric/electrostrictive elements are covered with coating films made of a material with a low thermal expansion coefficient.
申请公布号 US2005268444(A1) 申请公布日期 2005.12.08
申请号 US20050185300 申请日期 2005.07.20
申请人 NGK INSULATORS, LTD. 发明人 NAMERIKAWA MASAHIKO;SHIBATA KAZUYOSHI
分类号 H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/24;(IPC1-7):H04R17/00 主分类号 H01L41/09
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