MICROWAVE ELECTRODELESS DISCHARGE LAMP APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable irradiation of microwaves with high output to generate plasma light with high luminance.

SOLUTION: A microwave electrodeless discharge lamp apparatus comprises a box-shape applicator 4 connected to a waveguide with a magnetron to radiate microwaves connected thereto and made of metal plate member having an opening window 6 to transmit the plasma light on one side face; a lamp house 7 held and fixed to face the opening window 6 inside the applicator 4 to transmit the plasma light; a pipe 7a housed inside the lamp hose 7 to transmit the plasma light; an electrodeless discharge lamp 11 held and fixed on a concentric axis inside the pipe 7a, with a gap between a circumference face of the pipe 7a to emit the plasma light by irradiating the microwaves; and a pair of tube joints 19a, 19b connected to both opposite ends of the pipe 7a to run through a liquid cooling medium into the gap. Thereby, the apparatus can lower a tube wall temperature of the discharge lamp 11 by cooling it with the cooling medium.

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