| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multisensor capable of recognizing the physical phenomenon or a chemical phenomenon of a biological sample. <P>SOLUTION: The sensor of a multiprobe type is provided with a plurality of probes formed by crystal growth with a semiconductor substrate 1 as a base, and is provided with a function, with the biological sample as an object, of detecting the physical phenomenon or the chemical phenomenon on the surface or in the inside. Also, the physical phenomenon or the chemical phenomenon to be a detection object is the potential of each part of the biological sample, and at least one or more amplifier circuits and signal processing circuits 3 are formed on the semiconductor substrate 1. Further, the side face part 9 of the probe 2 is covered with an insulation layer and a distal end part 8 is sharp. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
