| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength-variable filter of which the structure and manufacturing processes can be simplified, the size can be reduced and wavelength separation can be performed even in visible light, and a method for manufacturing the wavelength-variable filter. SOLUTION: The wavelength-variable filter 1 is provided with: a first substrate constituted of silicon and provided with a movable part 31 and a supporting part for displaceably supporting the movable part 31; a second substrate 2 opposed to the first substrate; and a driving part for changing an interval of a second gap 22 by displacing the movable part 31 from the 2nd substrate 2 by using a first gap 21 to generate interference through the second gap 22 in a space between a first reflection film 200 formed on a portion of the movable part 31 which corresponds to the second gap 22 and a second reflection film 210 formed on a face of the second substrate 2 which is opposed to the movable part 31. The movable part 31 has an aperture part 311 on a position corresponding to the first reflection film 200. COPYRIGHT: (C)2006,JPO&NCIPI
|
