| 摘要 |
PROBLEM TO BE SOLVED: To establish a method for producing high melting point metal powder having high purity and excellent formability, particularly spherical metal powder composed of Ta, Ru or the like having a melting point higher than that of iron, and to produce a target of high melting point metal and the alloy thereof having a chemical composition of high purity and low oxygen, and having high density and a fine and uniform structure as well by subjecting the above powder to pressure sintering. SOLUTION: A powder material essentially consisting of a high melting point metal material is introduced into thermal plasma with gaseous hydrogen introduced, thus is refined and spheroidized. Further, the obtained powder is subjected to pressure sintering by hot hydrostatic pressing or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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