摘要 |
A semiconductor device having a buffer layer pattern and a related method of manufacture are disclosed. The semiconductor device comprises at least two bit line patterns formed on a semiconductor substrate having a buried insulating interlayer. Each bit line pattern is formed of a bit line and a bit line capping layer pattern formed on the bit line. A buffer layer pattern is formed to cover one of the bit line patterns, and bit line spacers are formed on sidewalls of the remaining bit line patterns. A planarized insulating interlayer covers the buffer layer pattern and the bit line spacers. A bit line contact hole passing through the planarized insulating interlayer, the buffer layer pattern, and the bit line capping layer pattern, is formed on the bit line.
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