发明名称 Semiconductor device having buffer layer pattern and method of forming same
摘要 A semiconductor device having a buffer layer pattern and a related method of manufacture are disclosed. The semiconductor device comprises at least two bit line patterns formed on a semiconductor substrate having a buried insulating interlayer. Each bit line pattern is formed of a bit line and a bit line capping layer pattern formed on the bit line. A buffer layer pattern is formed to cover one of the bit line patterns, and bit line spacers are formed on sidewalls of the remaining bit line patterns. A planarized insulating interlayer covers the buffer layer pattern and the bit line spacers. A bit line contact hole passing through the planarized insulating interlayer, the buffer layer pattern, and the bit line capping layer pattern, is formed on the bit line.
申请公布号 US2005273680(A1) 申请公布日期 2005.12.08
申请号 US20050122059 申请日期 2005.05.05
申请人 PARK JEONG-JU 发明人 PARK JEONG-JU
分类号 H01L21/28;G11C29/00;H01L21/768;H01L21/8242;H01L23/522;(IPC1-7):G11C29/00 主分类号 H01L21/28
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