发明名称 OPTICAL MODULE FOR A LENS
摘要 Disclosed is an optical module for a lens, especially a microlithographic apparatus, comprising a first holding device (2) with an inner circumference (2.1) that extends in a first circumferential direction (2.2), and at least one first supporting device (3.1) which is fastened to the inner circumference (2.1) of said first holding device (2) and is used for supporting a first optical element (5.1), an annular circumferential first assembly space (3. 18) being defined by displacing the first supporting device (3.1) once in a revolving manner along the first circumferential direction (2.2). At least one second supporting device (3.2) which is fixed to the inner circumference (2.1) of the first holding device (2) is provided for supporting a second optical element (5.2), an annular circumferential second assembly space (3.28) being defined by displacing the second supporting device (3.2) once in a revolving manner along the first circumferential direction (2.2). The first assembly space (3.18) intersects the second assembly space (3.28).
申请公布号 WO2005116773(A1) 申请公布日期 2005.12.08
申请号 WO2005EP05600 申请日期 2005.05.24
申请人 CARL ZEISS SMT AG;KUGLER, JENS;SORG, FRANZ 发明人 KUGLER, JENS;SORG, FRANZ
分类号 G02B7/02;G02B17/06;G03F7/20 主分类号 G02B7/02
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