发明名称 Method for fabricating a nanopattern and a carbon nanotube bio-nanoarray using the self-assembly of supramolecules and UV etching
摘要 A method for forming a groove-shaped nanopattern, which involves the steps of forming a thin film of supramolecules on a substrate, inducing the self-assembly of the supramolecules by annealing to form regular structures, and applying UV to the formed regular structures of supramolecules. A method for fabricating a CNT nanoarray is also described, which includes the step of forming a regular metal catalyst array for synthesizing CNT using a formed nanopattern of supramolecules as a mask, and then synthesizing CNT vertically. In another aspect, a method is described for fabricating a CNT-bionanoarray, which involves attaching a bioreceptor to the fabricated CNT array.
申请公布号 US2005269285(A1) 申请公布日期 2005.12.08
申请号 US20040859529 申请日期 2004.06.02
申请人 JUNG HEE T;JUNG DAE H;KO YOUNG K;KWON KI Y;LEE SU R 发明人 JUNG HEE T.;JUNG DAE H.;KO YOUNG K.;KWON KI Y.;LEE SU R.
分类号 G01N33/53;B01J23/745;B01J23/75;B01J23/755;B82B3/00;C01B31/00;C01B31/02;C23F1/00;D01F9/127;G01N37/00;G03F7/00;G03F7/004;G03F7/20;G11B5/855;(IPC1-7):C23F1/00 主分类号 G01N33/53
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