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发明名称
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINER RECHTECKIGEN LICHTSTRAHLMATRIX
摘要
申请公布号
DE60023630(D1)
申请公布日期
2005.12.08
申请号
DE20006023630
申请日期
2000.05.19
申请人
APPLIED MATERIALS, INC.
发明人
HOWELLS, C.
分类号
G02B5/08;G02B27/09;G02B27/14;G03F7/20;H01L21/027;(IPC1-7):G02B27/14
主分类号
G02B5/08
代理机构
代理人
主权项
地址
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