发明名称 |
MAGNETIC STORAGE DEVICE AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic storage device and its manufacturing method capable of being improved in reliability thereof. SOLUTION: The magnetic storage device includes a magnetoresistive effect element MTJ provided on a first writing wiring WL. The first writing wiring includes a wiring layer 37 embedded and formed in a groove in an insulating layer 34, and a barrier metal layer 38 embedded and formed in the groove on the wiring layer. COPYRIGHT: (C)2006,JPO&NCIPI
|
申请公布号 |
JP2005340366(A) |
申请公布日期 |
2005.12.08 |
申请号 |
JP20040154885 |
申请日期 |
2004.05.25 |
申请人 |
TOSHIBA CORP |
发明人 |
KAJIYAMA TAKESHI;UEDA TOMOMASA;KISHI TATSUYA;AIKAWA HISANORI;YOSHIKAWA MASAHISA |
分类号 |
H01L27/105;H01L21/8246;H01L27/22;H01L31/113;H01L43/08;(IPC1-7):H01L27/105 |
主分类号 |
H01L27/105 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|