发明名称 MAGNETIC STORAGE DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a magnetic storage device and its manufacturing method capable of being improved in reliability thereof. SOLUTION: The magnetic storage device includes a magnetoresistive effect element MTJ provided on a first writing wiring WL. The first writing wiring includes a wiring layer 37 embedded and formed in a groove in an insulating layer 34, and a barrier metal layer 38 embedded and formed in the groove on the wiring layer. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005340366(A) 申请公布日期 2005.12.08
申请号 JP20040154885 申请日期 2004.05.25
申请人 TOSHIBA CORP 发明人 KAJIYAMA TAKESHI;UEDA TOMOMASA;KISHI TATSUYA;AIKAWA HISANORI;YOSHIKAWA MASAHISA
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L31/113;H01L43/08;(IPC1-7):H01L27/105 主分类号 H01L27/105
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