| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean sheet capable of holding the inside of a clean capsule in a clean environment and easily taking in and out an article. SOLUTION: Pass boxes 32, 33 are formed so that their inner capacities are smaller than the inner capacity of a clean box 11, and the flow rate of air sent from sub dust removing units 46, 47 to the pass boxes 32, 33 is set higher than the flow rate of air sent to the clean box 11 by a main dust removing unit 12. COPYRIGHT: (C)2006,JPO&NCIPI
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