| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion resistant glass member having sufficient corrosion resistance against a halogen gas, excellent workability, small Al contamination and low in selective corrosion causing the occurrence of particles. SOLUTION: A part of the corrosion resistant glass member where exposed by the halogen gas contains 50-1,000 wt.ppm Al and has a melt-treated surface. The member is manufactured by mixing silica power, transition alumina powder and/or alumina-silica compound oxide power and melting the mixture. COPYRIGHT: (C)2006,JPO&NCIPI
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