| 发明名称 |
Systems, apparatus, and methods having a mechanical logic function in a microelectromechanical system sensor |
| 摘要 |
According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing portion that generates a mechanical movement in response to a measurand input. The sensor also includes a logic portion to mechanically perform a logic function in response to the movement.
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| 申请公布号 |
US2005270166(A1) |
申请公布日期 |
2005.12.08 |
| 申请号 |
US20040863376 |
申请日期 |
2004.06.08 |
| 申请人 |
BERKCAN ERTUGRUL |
发明人 |
BERKCAN ERTUGRUL |
| 分类号 |
G01D3/08;G01P1/12;G01P15/08;G01R15/20;G01R33/028;G08B21/00;(IPC1-7):G08B21/00 |
主分类号 |
G01D3/08 |
| 代理机构 |
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代理人 |
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